The Zeiss Optoplex NGQ software can create *.csv files which contain all measured spectra of an exsitu traverse scan. Von Ardenne exsitu files have a similar content.
You can now easily fit the spectra of all probehead positions using the batch control window. Once you have a good fit routine, you can execute the batch control menu command “Prepare/New batch fit”, followed by the command “Prepare/New results page for Optoplex NGQ file” or “Prepare/New results page for Von Ardenne exsitu file”. Then press “Go”.
CODE will fit all spectra and write the fit results to the page “Results”. Using view objects of type “Batch control graph (rows)” you can visualize obtained thickness profiles, for example.