Thin film analyis with SCOUT

SCOUT is mostly used to analyze measured spectra. Many customers apply it in order to find out if thin films have the right thickness and composition. Depending on the problem, the spectral range can be the UV, visible, NIR or mid- and far infrared. Typical measured quantities are transmittance, reflectance or ellipsometry angles.

In simple cases the analysis of a single spectrum is sufficient. It might be necessary, however, to record many spectra (transmittance and reflectance, reflectance at different angles of incidence and different polarization) and to analyze all data simultaneously.

In research and developing work SCOUT is used offline. Spectra of relevant samples are recorded in the lab or in the production. Later the data files are analyzed by SCOUT, manually loaded or automatically processed using the batch mode feature.

In production control a tight connection of SCOUT with the measurement system is required. An elegant way to achieve this is to make use of SCOUT's OLE automation mechanism. You can use, for example, LabView to control both your hardware and the SCOUT analysis. The results obtained by SCOUT in the background can be displayed to the operators through a LabView screen, providing useful information for adjusting the deposition devices.

Examples of analysis of layer stacks by simulation