Analysis of layer stacks by simulation
In the case of layered systems a very powerful technique to interpret optical spectra is given by a simulation of the experiment and adjustment of the model parameters to fit the measured data. Fortunately, rather simple models of optical constants often lead to a realistic simulation of optical spectra. This enables quick parameter fits from which the wanted information can be obtained.
The interpretation of optical spectra is the central task of our SCOUT software. Some typical examples of successful cases are given in the following.
'Halfspace examples', i.e. there is just one reflection of the probing radiation at an interface:
- Infrared analysis of charge carriers in doped semiconductors
- The description of vibrational modes in ionic crystals
- Interband transitions
Optical thin film analysis:
- Infrared analysis of epitaxial silicon layers
- A simple batch processing example: Ag layers on glass, determination of the sputtering rate
- Absorption bands and interference fringes: Photoresist layers on silicon wafers
- Poly-crystalline silicon on silicon oxide
- Amorphous thin films (a brief introduction to the OJL interband transition model)